Semiconductor chip package and fabrication method thereof

ABSTRACT

A semiconductor chip package includes a first semiconductor chip, that is an MEMS chip having a movable structure. The movable structure has a movable section. The first semiconductor chip includes a plurality of first electrode pads, and a first sealing section. The first sealing section is a closed loop formed on the top face of the frame section surrounding the movable structure. The first semiconductor chip also includes a thin plate member for sealing the movable structure. The semiconductor chip package also includes a second semiconductor chip. The second semiconductor chip has a plurality of second electrode pads. The semiconductor chip package also includes a substrate. The substrate has third electrode pads. The first and second semiconductor chips are mounted on the substrate. First bonding wires connect the first electrode pads to the second electrode pads. Second bonding wires connect the second electrode pads to the third electrode pads.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor chip package and a fabrication method thereof.

2. Description of the Related Art

Technology to fabricate a several hundred μm size micro structure using micro machining technology, such as semiconductor micro processing technology, has been developing. For example, application of this technology to various sensors, optical switches in the optical communication field and radio frequency (RF) components has begun.

Such micro structures can be fabricated using a conventional semiconductor fabrication process, so that it can be integrated into a single chip.

A chip on which a system having specific functions, including this micro structure, is constructed is called a Micro-Electrical-Mechanical System (MEMS) chip, or a Micro-System-Technology (MIST) chip (hereafter simply called an MEMS device). One example of known MEMS devices is an acceleration sensor, and disclosed in Japanese Patent Application Kokai (Laid-Open) No. 11-135804.

The piezo acceleration sensor chip disclosed in Japanese Patent Application Kokai No. 11-135804 has a frame. This frame includes a center section and beam sections. The beam sections extend between the inner side face of the frame and the center section. The weight section is supported in the center section such that the weight section can oscillate. The support member supports the bottom face of the frame, and encloses the outer edge of the weight section via notches.

The weight section is an element that is moved by external force (stress), so that it is also called a “movable section” or “movable element.” The movable element and the beams are integrated into a micro structure. Each beam is thin and narrow.

The sensor chip having this configuration is generally provided as a packaged device.

An example of conventional acceleration sensor chip packages will now be described with reference to FIGS. 11A and 11B of the accompanying drawings.

FIG. 11A is a plan view depicting the composing elements of a conventional acceleration sensor chip package. To show the internal configuration, an illustration of the top face of the protective cover (will be described) is omitted.

FIG. 11B is a cross sectional view taken along the dashed line 11B-11B in FIG. 11A.

This acceleration sensor chip package 100 has an acceleration sensor chip 110. The acceleration sensor chip 110 has a plurality of electrode pads 112. The electrode pads 112 are pads for supplying signals to another element from the acceleration sensor chip 110 or introducing signals to the acceleration sensor chip 110. In the acceleration sensor chip 110, a movable structure 114, which operates mechanically, is built in.

The acceleration sensor chip 110 also has a sealing substrate 116 which seals and restricts the movement of the movable structure 114. This sealing substrate 116 is bonded to the substrate 120 by adhesive material 122.

The protective cover 130 has a turned bowl shape. On the substrate 120, the lower edge of the protective cover 130 is bonded. The protective cover 130 and sealing substrate 116 constitute a closed space 140 for sealing the acceleration sensor chip 110.

At the edges of the substrate 120, external terminals 150 are provided. The external terminals 150 extend to the outside from inside the closed space 140. In the closed space 140, the external terminals 150 and the electrode pads 112 of the sensor chip 110 are electrically connected to each other by bonding wires 160.

In order to seal the entire chip by mold resin without interfering with the operation of the detecting section of the acceleration sensor, a structure to create a frame-shaped mold resin inhibited area around the detecting section is used. Such structure is disclosed in Japanese Patent Application Kokai No. 7-225240.

According to the above described acceleration sensor chip package, the acceleration sensor chip and external terminals are electrically connected by the bonding wires. The protective cover is used to contain the bonding wires and to seal the acceleration sensor chip. Therefore, seal-by-potting using transfer mold or liquid resin cannot be performed, and the area of the package increases.

In the fabrication method of the conventional sensor chip package, the acceleration sensor chip is diced and then packaged. Thus, the cutting chips created during the dicing process may attach to the movable (weight) element and its vicinity. This will hinder the operation of the movable element.

As Japanese Patent Application Kokai No. 7-225240 discloses, for example, attaching a special member to the acceleration sensor chip makes the fabrication steps more complicated. This worsens the throughput not only of the acceleration sensor chip, but also of the acceleration sensor chip package, which is the final product.

Therefore a technology for further downsizing the acceleration sensor chip package, and a technology for improving yield and productivity, particularly by preventing damage of the movable element when the acceleration sensor chip package is fabricated, and implementing simplifier fabrication steps are desired.

SUMMARY OF THE INVENTION

The semiconductor chip package according to one aspect of the present invention has the following configuration.

The semiconductor chip package has a first semiconductor chip, that is an MEMS chip. The first semiconductor chip has a frame section having a top face and a bottom face. The bottom face is generally in parallel to the top face. In the frame section, a movable structure including a movable section is provided. On the top face of the frame section, a plurality of first electrode pads are arranged. On the top face of the frame section, a first sealing section, that is a closed loop, is formed surrounding the movable structure. On the first sealing section, a thin plate member for sealing the movable structure is provided. The semiconductor chip package also has a second semiconductor chip. The second semiconductor chip has a first surface and a second surface. The second surface is generally in parallel to the first surface. The second semiconductor chip also a plurality of second electrode pads arranged on the first surface. The semiconductor chip package also has a substrate. The substrate has a first main surface on which a semiconductor chip mounting area is formed. The substrate also has a second main surface which is generally in parallel to the first main surface. The substrate also has third electrode pads provided along a certain edge of the first main surface outside the semiconductor chip mounting area. The first and second semiconductor chips are mounted on the semiconductor chip mounting area. The semiconductor chip package has first bonding wires for connecting the first electrode pads to the second electrode pads, and second bonding wires for connecting the second electrode pads to the third electrode pads.

According to the semiconductor chip package of the present invention, only essential space is secured. Thus, remarkable downsizing of the package can be implemented. In addition, this package configuration can be used for a variety of package formats.

A manufacturing method for a semiconductor chip package according to a second aspect of the present invention has the following steps.

The method for fabricating a semiconductor chip package has a step of preparing a first semiconductor chip, that is an MEMS chip. The first semiconductor chip includes a frame section having a top face and a bottom face, a movable structure having a movable section formed in the frame section, and a plurality of first electrode pads arranged on the top face of the frame section. The top face of the frame section is generally in parallel to the bottom face of the frame section. A first sealing section, that is a closed loop, is provided on the top face of the frame section to surround the movable structure. A thin plate member is provided on the first sealing section for sealing the movable structure. The fabrication method also includes a step of preparing a second semiconductor chip. The second semiconductor chip includes a first surface having a plurality of sides and a second surface, and a plurality of second electrode pads arranged on the first surface. The first surface of the second semiconductor chip is generally in parallel to the second surface of the second semiconductor chip. The fabrication method also includes a step of preparing a substrate. The substrate includes a first main surface on which a semiconductor chip mounting area is formed, a second main surface in parallel to the first main surface, and third electrode pads formed along one edge of the first main surface outside the semiconductor chip mounting area. The fabrication method also includes a step of mounting the first and second semiconductor chips on the chip mounting area of the substrate. The fabrication method also includes a step of forming first bonding wires for connecting the first electrode pads to the second electrode pads, and second bonding wires for connecting the second electrode pads to the third electrode pads.

According to the semiconductor chip package fabrication method of the present invention, acceleration sensor chip packages are fabricated in simple steps, and yield can be remarkably improved.

The MEMS chips (first semiconductor chips) of the package are individually separated after the first sealing section is formed for each chip on the wafer level. Thus, only if the semiconductor substrate is positioned, positioning for each chip is unnecessary when making the first sealing section. Because the positioning for each chip is unnecessary, positioning accuracy, that is repeatability, can be improved. As a result, the first sealing section can be accurately formed. Therefore an improvement of yield and productivity of MEMS chips and the package including the MEMS chips can be achieved.

According to still another aspect of the present invention, there is provided a fabrication method for a semiconductor chip package. The fabrication method includes the step of preparing a first semiconductor chip. The first semiconductor chip includes a frame section having a top face and a bottom face, a movable structure having a movable section formed in the frame section, a plurality of first electrode pads arranged on the top face of the frame section, a first sealing section provided on the top face of the frame section and having a closed loop shape to surround the movable structure, and a thin plate member provided on the first sealing section for sealing the movable structure. The fabrication method also includes the step of preparing a second semiconductor chip. The second semiconductor chip includes a first surface having a plurality of sides, a second surface in parallel to the first surface, and a plurality of second electrode pads arranged on the first surface side. The fabrication method also includes the step of preparing a substrate. The substrate includes a first main surface having a semiconductor chip mounting area, a second main surface in parallel to the first main surface, and a plurality of third electrode pads formed along an edge of the first main surface outside the semiconductor chip mounting area. The fabrication method also includes the step of mounting the first and second semiconductor chips on the chip mounting area of the substrate. The fabrication method also includes the step of forming first bonding wires for connecting the first electrode pads to the second electrode pads respectively. The fabrication method also includes the step of forming second bonding wires for connecting the second electrode pads to the third electrode pads respectively.

The step of mounting the first and second semiconductor chips may include mounting the second semiconductor chip on the chip mounting area such that the second surface of the second semiconductor chip contacts the chip mounting area, and mounting the first semiconductor chip on the first surface of the second semiconductor chip such that the bottom face of the first semiconductor chip contacts the first surface of the second semiconductor chip, with the second electrode pads of the second semiconductor chip exposed.

The substrate may be a container type ceramic header having a concave section, and the step of mounting the first and second semiconductor chips may include mounting the first and second semiconductor chips in the semiconductor chip mounting area formed in the concave section.

The substrate may be a metal substrate or a resin substrate, and the fabrication method may further include the step of forming a second sealing section for covering and sealing the first semiconductor chip, the second semiconductor chip, the first sealing section, the first bonding wires and the second bonding wires after forming the second bonding wires.

The step of preparing the first semiconductor chip includes preparing a semiconductor substrate having a plurality of movable structures, forming each first sealing section on each the frame section by injecting liquid resin on the top face of each frame section in a closed loop shape surrounding each movable structure, bonding a thin plate member on the entire top face of each first sealing section, and then separating the semiconductor substrate into individual first semiconductor chips.

The step of preparing the first semiconductor chip may include preparing a semiconductor substrate having a plurality of movable structures, forming each first sealing section on each frame section by bonding a frame shaped sheet member on the top face of each frame section surrounding each movable structure, bonding a thin plate member on the entire top face of each first sealing section, and then separating the semiconductor substrate into individual first semiconductor chips.

According to yet another aspect of the present invention, there is provided a fabrication method for a semiconductor chip package. The fabrication method includes the step of preparing a first semiconductor chip. The first semiconductor chip includes a frame section having a top face and a bottom face, a movable structure having a movable section formed in the frame section, a plurality of first electrode pads arranged on the top face side of the frame section, a first sealing section provided on the top face of the frame section and having a closed loop shape surrounding the movable structure, and a thin plate member provided on the first sealing section for sealing the movable structure. The fabrication method also includes the step of preparing a second semiconductor chip having a first surface and a second surface, and a plurality of second electrode pads arranged on the first surface side. The first surface is parallel to the second surface. The fabrication method also includes the step of preparing a lead frame including a chip mounting section that has a front face and a back face, and a plurality of leads provided away from an edge of the chip mounting section. The fabrication method also includes the step of mounting the first and second semiconductor chips on the front face of the chip mounting section, and forming first bonding wires for connecting the first electrode pads to the second electrode pads respectively. The fabrication method also includes the step of forming second bonding wires for connecting the second electrode pads to the leads respectively. The fabrication method also includes the step of forming a second sealing section for covering and sealing the first semiconductor chip, the second semiconductor chip, the first sealing section, the chip mounting section, the first bonding wires and the second bonding wires, with a part of said leads exposed.

The step of preparing the first semiconductor chip may include preparing a semiconductor substrate having a plurality of movable structures, forming each first sealing section on each frame section by injecting liquid resin on the top face of each frame section in a closed loop shape surrounding each movable structure, bonding a thin plate member on the entire top face of each first sealing section, and then separating the semiconductor substrate into individual first semiconductor chips.

The step of preparing the first semiconductor chip may include preparing a semiconductor substrate having a plurality of movable structures, forming each first sealing section on each frame section by bonding a frame shaped sheet member on the top face of each frame section surrounding each movable structure, bonding a thin plate member on the entire top face of each first sealing section, and then separating the semiconductor substrate into individual first semiconductor chips.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a plan view depicting the composing elements of the semiconductor chip according to a first embodiment of the present invention;

FIG. 1B is a cross-sectional view taken along the dashed line 1B-1B in FIG. 1A;

FIG. 2A is a plan view depicting the semiconductor chip during fabrication on the waver level according to the first embodiment of the present invention;

FIG. 2B is a cross-sectional view taken along the dashed line 2B-2B;

FIG. 3A is a plan view similar to FIG. 2A, showing the semiconductor chip subsequent to FIG. 2A during the manufacturing process;

FIG. 3B is a cross-sectional view taken along the line 3B-3B in FIG. 3A;

FIG. 4A is a plan view similar to FIG. 2A, showing the semiconductor chip subsequent to FIG. 3A during the manufacturing process;

FIG. 4B is a cross-sectional view taken along the line 4B-4B in FIG. 4A;

FIG. 5A is a plan view similar to FIG. 2A, showing the semiconductor chip subsequent to FIG. 4A during the manufacturing process;

FIG. 5B is a cross-sectional view taken along the line 5B-5B in FIG. 5A;

FIG. 6A is a plan view depicting the composing elements of the semiconductor device according to the second embodiment of the present invention;

FIG. 6B is a cross-sectional view taken along the dashed line 6B-6B in FIG. 6A;

FIG. 7A is a plan view depicting the composing elements of the semiconductor device according to the third embodiment of the present invention;

FIG. 7B is a cross-sectional view taken along the dashed line 7B-7B in FIG. 7A;

FIG. 8A is a plan view depicting the composing elements of the semiconductor device according to the fourth embodiment of the present invention;

FIG. 8B is a cross-sectional view taken along the dashed line 8B-8B in FIG. 8A;

FIG. 9A is a top view of the semiconductor chip package according to a modification to the fourth embodiment;

FIG. 9B shows a cross-sectional view taken along the single-dot chain line 9B-9B in FIG. 9A;

FIG. 10A is a plan view of the semiconductor chip package of the fifth embodiment;

FIG. 10B is a cross-sectional view taken along the line 10B-10B in FIG. 10A;

FIG. 11A is a plan view of a conventional semiconductor device; and

FIG. 11B is a cross-sectional view taken along the line 11B-11B in FIG. 11A.

DETAILED DESCRIPTION OF THE PRESENT INVENTION

Embodiments of the present invention will now be described with reference to the drawings. In the drawings, the shape, size and positional relationship of each composing element are shown just enough to assist in understanding the present invention, and therefore the present invention is not limited to the illustrated examples.

In the following description, specific materials, conditions and numerics may be used, but these are merely examples, and the present invention is not limited by these examples.

In the drawings, the same composing elements are denoted with the same reference symbols, and redundant description thereof may be omitted.

First Embodiment

First a configuration example of the semiconductor chip of the present invention will be described with reference to FIG. 1A and FIG. 1B. Here a piezo acceleration sensor chip having a piezo resistance element as the functional element will be described.

Here the acceleration sensor chip is a chip that can measure acceleration (hereafter also called “chip”), and the acceleration sensor chip package is a packaged device including this acceleration sensor chip.

FIG. 1A illustrates the composing elements of the semiconductor chip of this embodiment viewed from the top.

As FIG. 1A and FIG. 1B show, the first semiconductor chip 10 includes a chip 11. The chip 11 includes a frame section 13 having the top face 13 a and the bottom face 13 b. The bottom face 13 b is generally in parallel to the top face 13 a. The frame section 13 is a square frame defining the outer shape (contour) of the chip 11.

The chip 11 has the opening section 16. In this embodiment, the opening section 16 is a through hole surrounded by the frame section 13.

The chip 11 has the movable structure 15. This movable structure 15 has beam sections 14 a and movable (weight) section 14 b. The movable section 14 b is continuous to the beam sections 14 a and movable.

From the frame section 13, the beam sections 14 a protrude to the opening section 16. The beam sections 14 a have a thin thickness and narrow width. The beam sections 14 a are flexible sections which deflect (bend) when the movable section 14 b moves.

At the tips of the beam sections 14 a protruding into the opening section 16, the movable section 14 b is provided. The movable section 14 b is suspended in the opening section 16 by the beam sections 14 a, and is received within the opening section 16.

The height of the top face 14 ba of the movable section 14 b is roughly the same as the height of the frame section 13 and beam sections 14 a, and the thickness A of the movable section 14 b is smaller than the thickness B of the frame section 13. The movable section 14 b is supported in the hollow area of the opening section 16 by the beam sections 14 a.

The movable structure 15 is formed in a silicon wafer. The frame section 13 is continuous to the beam sections 14 a. By this continuity or integration, the frame section 13 supports the beam sections 14 a and the beam sections 14 a support the movable section 14 b.

The movable section 14 b must be structured so as to be able to move in the arrow a and b directions in FIG. 1B for measurement of acceleration. In order to prevent direct contact of the movable section 14 b with the frame section 13 and prevent the movement of the movable section 14 b from being hindered by the beam sections 14 a, the movable section 14 b and frame section 13 are separated from each other with the space 16 a, and the side edges of the beam sections 14 a and movable section 14 b, except the portions connecting the frame section 13 with the movable section 14 b, are also separated from each other with the space 16 a.

In this embodiment, the movable structure 15 has the four beam sections 14 a and the movable section 14 b supported from four directions by the four beam sections 14 a. It should be noted, however, that the configuration of the semiconductor chip of the present invention is not limited to this configuration example. For instance, various known configurations used for the movable structure of an MEMS chip can be employed. If the semiconductor chip is an acceleration sensor chip, the movable section 14 b may be supported from one direction, i.e., a so called cantilever type configuration may be employed.

The first semiconductor chip 10 shown in FIG. 1A has the same size (outer dimensions) as the chip 11 viewed from the top (or bottom). The shape of the first semiconductor chip 10 is rectangular parallelepiped in the illustrated embodiment, but the present invention is not limited in this regard.

In the configuration shown in FIG. 1A and FIG. 1B, each beam section 14 a protrudes from the center of each side of the square-shaped frame section 13 into the opening section 16 at right angles. The upper surfaces of the beam sections 14 a are coplanar to the upper surface of the frame section 13.

The movable section 14 b is supported by the tips of the four protruding portions of the beam sections 14 a. The movable section 14 b is cubic in this example. The two-dimensional shape of the movable section 14 b, when viewed from the top, is a square, and each beam section 14 a is connected to the center part of each of the four sides of the square which is the top face of the cube.

In this embodiment, the shape of the movable section 14 b is cubic. However the present invention is not limited to this, and can have other shapes according to the expected acceleration and measurement conditions.

On the beam sections 14 a, the detection elements 19 are provided. These detection elements 19 are piezo resistance elements in this embodiment.

An appropriate number of detection elements 19 are arranged at appropriate positions according to the design, which allows the desired measurement of acceleration. The detection elements 19 are elements for detecting the displacement (acceleration) of the movable structure 15.

It should be noted that the detection element 19 is not limited to the piezo resistance element. For example, a detection element, which is applied to an electrostatic capacitance type acceleration sensor, can be used.

To each of the piezo resistance elements 19, a wire for supplying signals to the outside or for receiving signals from the outside to the piezo resistance element 19 is connected (not illustrated). For this wire, a conventional interconnect structure can be used. For wire material, a general material, such as aluminum (Al), can be used.

On the frame 13, the first sealing section 20 is provided surrounding the opening section 16, that is the space 16 a, such that the frame section 13 is separated from the edges of the opening section 16.

As FIG. 1B shows, the first sealing section 20 is a closed loop of a line with an equal width. In this embodiment, the outer contour of the first sealing section 20 is square and the inner contour is also square. The first sealing section 20 is spaced from the opening section 16 at an equal distance in all sections.

For the first sealing section 20, it is preferable to use a known liquid resin, or a sheet material such as a bonding sheet which has an appropriate bonding means.

A partial area of the frame section 13 outside the first sealing section 20 is called the outer area 13 c.

On the top face 20 a of the first sealing section 20, the thin plate member 30 is bonded by the adhesion of the first sealing section 20.

The thin plate member 30 is spaced from the beam sections 14 a and the movable section 14 b. In other words, the thin plate member 30 seals the movable structure 15 from the upper side of the opening section 16 (space 16 a) such that bending of the beam sections 14 a and movements of the movable section 14 b are not hindered. For this thin plate member 30, resin, silicon (Si), glass and such metal as copper can be used as the material. When silicon is used, the thin plate member 30 may be configured to become a control chip having a circuit for processing signals supplied from the chip 11.

The thin plate member 30 seals the movable structure 15, and plays a function to control (restrict) the operation (movement) of the movable section 14 b in the upward direction (i.e., in the direction to the top face 14 ba). Therefore the height C of the space between the thin plate member 30 and the top face 14 ba of the movable section 14 b is set to be a value which allows the movable section 14 b to move in the arrow a direction to the extent that the acceleration sensor can measure desired acceleration. Also, in order to prevent the beam sections 14 a from moving upwards beyond a critical value, the height C should be smaller than a maximum allowable stroke of the beam sections 14 a. The beam sections 14 a may break when its upward movement exceeds the critical value. The thickness of the first sealing section 20 is therefore decided on the basis of the desired acceleration measurement and critical value for the upward movement of the beam sections 14 a. Likewise, the gap D between the lower surface 14 bb of the movable section 14 b and the mounting surface of the semiconductor chip 10 is decided on the basis of the desired acceleration measurement and the maximum allowable stroke of the beam sections 14 a. If the acceleration sensor has a square shape of about 2 mm×about 2 mm, the height C is between 10 and 30 micrometers and the gap D is between 10 and 30 micrometers.

The clearance D is the distance between the lower surface 13 b of the frame 13 and the lower surface 14 bb of the movable section 14 b. The size of the clearance D is decided such that the movable section 14 b can move downwards sufficiently for the desired acceleration detection.

Preferably the outer size of the thin plate member 30 is as small as possible, but should not be smaller than the outer size of the first sealing section 20. The outer size of the thin plate member 30 may be greater than the outer contour of the first sealing section 20, but is set to an appropriate size which does not affect the wire bonding to the first electrode pads. The thickness of the thin plate member 30 may be arbitrary, but is preferably as thin as possible within a range where the functions as an MEMS chip are not affected, so that the general thickness of the semiconductor chip 10 is decreased.

The plate member 30 of the first semiconductor chip 10 is extremely thin. Therefore, the thickness of the package can be decreased while achieving sufficient sealing of the movable structure.

On the area 13 c of the frame section 13, which is defined outside the first sealing section 20 formed on the frame section 13, a plurality of first electrode pads 18 are provided. The first electrode pads 18 are exposed from the frame section 13.

Generally on the surface of the acceleration sensor chip, an insulation film, such as a passivation film, is formed. The first electrode pads 18 are formed so as to be exposed from this insulation film.

The first electrode pads 18 are electrically connected to the detection elements 19 of the beam sections 14 a via the above mentioned interconnects, which are not illustrated.

In this embodiment, five first electrode pads 18 are staggered in two rows along one of the four sides of the square plate member 30, so that wire bonding is possible.

Now the operation of the semiconductor chip 10 will be briefly described.

When acceleration is applied to the semiconductor chip 10, the movable section 14 b displaces. In other words, a deflection amount, according to the displacement of the movable section 14 b, is generated on the beam sections 14 a supporting the movable section 14 b. This deflection amount is measured as the electrical change amount of resistance of the detection elements 19 formed in the beam sections 14 a. The measured change amount of the resistance value is sent to a certain element via the first electrode pads 18 electrically connected to the detection elements 19. In this way, the acceleration applied to the semiconductor chip 10 is quantitatively detected.

According to the semiconductor chip of this embodiment, the movable section 14 b sensitive to stress, such as impact, can be sealed in a minimum area and minimum height, so that a slimmer semiconductor chip can be implemented.

Now a fabrication method for the first semiconductor chip 10 will be described with reference to FIG. 2A to FIG. 5B.

The fabrication method for the semiconductor chip 10 is characterized in that the movable structure is formed on the wafer level, the first sealing section and plate element are formed to seal the movable structure, and the wafer is separated into dies (individual semiconductor chips 10).

Now each fabrication step will be described. Many chip formation areas are formed in a matrix and many semiconductor chips are fabricated simultaneously on the wafer level. In the following description of the fabrication method, however, only two semiconductor chips to be formed in adjacent chip formation areas are dealt with for the sake of description.

FIG. 2A is a plan view depicting the semiconductor chip during fabrication on the wafer level, and FIG. 2B is a schematic cross-sectional view taken along the dashed line 2B-2B in FIG. 2A.

FIGS. 3A, 3B, 4A, 4B, 5A and 5B are a series of diagrams continuing from FIGS. 2A and 2B.

First, as FIG. 2A and FIG. 2B show, a silicon wafer 80, which is a semiconductor substrate, is prepared. The silicon wafer 80 has a first face 80 a and a second face 80 b. The second face is generally in parallel to the first face 80 a.

On the silicon wafer 80, a plurality of chip areas 80 c are partitioned. This chip area 80 c is an area which in the end becomes a semiconductor chip in the die separation step. In FIG. 2A, the dotted lines L1 separating the chip areas 80 c are scribe lines (dicing lines).

Then as FIG. 3A and FIG. 3B show, the movable structure 15 is formed in the silicon wafer 80 by processing the silicon wafer 80 by a known photolithography step and etching step. In other words, the movable structure 15, which plays an essential function of the acceleration sensor, is formed into each chip area 80 c. As mentioned above, the movable structure 15 has the movable section 14 b and the beam sections 14 a for supporting this movable section 14 b.

For specific steps of providing the elements of the acceleration sensor chip 11 including this movable structure 15, appropriate conventional processes can be used.

In a predetermined position of a beam section 14 a, a function element 19 for detecting acceleration, that is a piezo electric element 19 is formed by an ordinary wafer process.

To the piezo resistance element 19, one end of an interconnect (not shown) is electrically connected. This interconnect is made of aluminum (Al) for example, and is formed using an ordinary method. The other end of this interconnect is in an area outside the movable structure 15 in the chip area 80 c, such that this interconnect extends to a predetermined position of the frame section 13. This interconnect is covered by the insulation film, as mentioned above.

At the other end of this interconnect, a first electrode pad 18, exposed from the surface of the frame section 13, is formed so as to be electrically connected. The first electrode pad 18 may be formed by exposing a part of the interconnect from the insulation film formed on the surface of the frame section 13 of the acceleration sensor chip 11.

Then as FIG. 4A and FIG. 4B show, the first sealing section 20 is formed. One first sealing section 20 is formed in each of the chip areas 80 c existing in a matrix. If the first sealing section 20 is formed by a sheet member, the sheet member is molded in a frame shape in advance, and is placed on each chip area 80 c. If the first sealing section 20 is formed with liquid resin, a known dispense method using a dispenser, that is an injection step, can be used. The first sealing section 20 is contacted and bonded on the first face (upper face) 80 a of the silicon wafer 80 without making any gap.

If the first sealing section 20 is formed in each chip area 80 c on the wafer level in this manner, positioning for each chip and for each chip area 80 c becomes unnecessary because the positioning is done on the basis of the position of the silicon wafer 80. Thus, positioning accuracy (particularly, repeatability) can be improved. As a result, the first sealing section 20 can be accurately formed in each chip area 80 c. Therefore an improvement of yield can be expected.

Next, as FIG. 5A and FIG. 5B show, the thin plate member 30 is bonded on the entire top face 20 a of the first sealing section 20 without a gap. This thin plate member 30 is spaced from the movable structure 15. In other words, the thin plate member 30 seals the movable structure 15, together with the first sealing section 20, from the upper face side of the movable structure 15.

In this step, to form the first sealing section 20 by a sheet member, the first sealing section 20 and the thin plate member 30 are contacted and bonded by performing appropriate processing on the selected sheet member. For example, if the first sealing section 20 is a thermo-compression sheet, the thin plate member 30 is placed on the top face 20 a of the first sealing section 20, and thermo-compression is performed without a gap under predetermined conditions.

If the first sealing section 20 is made from liquid resin, the thin plate member 30 is placed on the top face 20 a of the first sealing section 20, and the liquid resin is cured under predetermined conditions.

Then as FIG. 5A and FIG. 5B show, dicing is performed on the area between the adjacent chip areas 80 c, that is along the scribe lines L1, using a conventional dicing device.

In this way, a plurality of semiconductor chips 10 having an identical structure, as described with reference to FIGS. 1A and 1B, can be fabricated from one wafer.

According to this fabrication method, the first sealing section 20 is formed on the wafer level, so that position accuracy of the first sealing section 20 in the chip area 80 c, that is repeatability, can be improved. As a result, the first sealing section 20 can be formed accurately in each chip area 80 c. Therefore improvement of yield of the semiconductor chips 10 can be expected. Further, because the dicing is carried out after the thin plate member 30 is placed, dicing refuse would not enter the inside of the semiconductor chip and would not attach onto the movable section. If the dicing refuse attach onto the movable section, the movable section could not function appropriately.

Second Embodiment

The second embodiment of the present invention will be described with reference to FIGS. 6A and 6B. The second embodiment relates to a packaged semiconductor device including the semiconductor chip having the configuration described above.

FIG. 6A depicts the composing elements of the semiconductor chip package of the second embodiment viewed from the top. FIG. 6B is a cross-section sectioned at the dashed line 6B-6B in FIG. 6A.

The semiconductor chip package of this embodiment is characterized in that the ceramic header is used for the substrate on which the semiconductor chip is mounted.

The ceramic header is a ceramic substrate having a concave section in which the semiconductor chip is received and mounted. Thus, the ceramic header is a container type ceramic substrate.

As FIG. 6A and FIG. 6B show, the semiconductor chip package 1 includes the ceramic header 40.

The ceramic header 40 has a first main surface 40 a and a second main surface 40 b. The second main surface 40 b is generally in parallel to the first main surface 40 a. The ceramic header 40 has a plurality of third electrode pads 42 exposed from the first main surface 40 a. The positions and number of the third electrode pads 42 are decided considering the positions and number of second electrode pads 52 of the second semiconductor chip 50, which are connected to the third electrode pads 42. The third electrode pads 42 are disposed in an area not covered by the second semiconductor chip 50 mounted on the ceramic header.

The ceramic header 40 has a plurality of external terminals 44. The external terminals 44 are exposed from the second main surface 40 b. The external terminals 44 function as electrodes to electrically connect the semiconductor chip package 1 to the packaging substrate.

In this embodiment, the ceramic header 40 has a base material 40X which has a single-layer structure. The ceramic header 40 has a first interconnect layer 41 including a plurality of interconnect sections on the surface 40Xa of the base material 40X at the first main surface 40 a side. On the first interconnect layer 41, the first insulation film 43 is formed so as to cover the first interconnect layer 41. The surface 43 a of the first insulation film 43 is the first main surface 40 a of the ceramic header 40. In the first insulation film 43, the opening section is formed so as to expose a part of the interconnect section of the first interconnect layer 41. This exposed portion becomes the third electrode pads 42.

The ceramic header 40 has a second interconnect layer 45 including a plurality of interconnect sections on the back face 40Xb of the base material 40X at the second main surface 40 b side. On the second interconnect layer 45, the second insulation film 46 is formed so as to cover the second interconnect layer 45. The surface 46 b of the second insulation film 46 corresponds to the second main surface 40 b of the ceramic header 40.

In the second insulation film 46, an opening section is formed so as to expose a part of the interconnect section of the second interconnect layer 45. This exposed section becomes an external terminal 44. In the illustrated embodiment, the external terminal 44 is a flat pad.

The ceramic header 40 has a side wall 49 which defines the concave section 49 a. The side wall 49 exists in the edge area 40 aa of the first main surface 40 a.

The edge area 40 aa is a frame-like area between the semiconductor chip mounting area and the side wall 49. The area of the ceramic container 40 inside the edge area 40 aa is referred to as the inner area 40 ab. The inner area 40 ab corresponds to the inner bottom face of the container 40 in which the semiconductor chip is mounted. In this embodiment, the first semiconductor chip 10 and the second semiconductor chip 50 are formed in the inner area 40 ab, and the third electrode pads 42 are also provided in the inner area 40 ab.

Five third electrode pads 42 are linearly arranged along one side of the square inner area 40 ab.

The side wall 49 is formed in the edge area 40 aa so as to be vertical to the first main surface 40 a. As FIG. 6A shows, the side wall 49 is formed to be a closed frame surrounding the inner area 40 ab.

The first and second semiconductor chips 10 and 50 are mounted in the inner area 40 ab.

The configuration of the first semiconductor chip 10 in the second embodiment is the same as the first semiconductor chip 10 in the first embodiment, which is described with reference to FIG. 1A to FIG. 5B, and therefore a detailed description thereof is omitted.

Now the configuration of the second semiconductor chip 50 will be described. The second semiconductor chip 50 performs electrical operation to control the operation of the MEMS chip, for example. The control chip normally has such functions as an amplifier function, angle calibration function, AD conversion function, DA conversion function and memory function.

The second semiconductor chip 50 has a rectangular parallelepiped shape that has a square first face 50 a and a square second face 50 b. The second face 50 b is generally in parallel to the first face 50 a. The second semiconductor chip 50 has second electrode pads 52. The second electrode pads 52 are exposed from the first face 50 a. Ten second electrode pads 52 are arranged in two rows along one side of the square in this embodiment.

The second electrode pads 52 include pads 52 b for connecting the first semiconductor chip, and pads 52 a for connecting the substrate. Out of the two rows of second electrode pads 52, one row closer to the side of the square is the substrate connection pads 52 a. The substrate connection pads 52 a are electrode pads to connect the third electrode pads 42 of the ceramic header 40. The other row close to the center area of the second semiconductor chip is the first semiconductor chip connection pads 52 b. The first semiconductor chip connection pads 52 b are electrode pads to connect the first electrode pads 18 of the first semiconductor chip 10.

The second semiconductor chip 50 is mounted on the ceramic header 40 such that the second face 50 b thereof faces the first main surface 40 a, and the third electrode pads 42 are exposed. The second semiconductor chip 50 is positioned so that the array of the second electrode pads 52 and the array of the third electrode pads 42 are wire bonded to each other. As FIG. 6A shows, the second semiconductor chip 50 is mounted such that the array of the second electrode pads 52 and the array of the third electrode pads 42 are parallel to each other.

The first semiconductor chip 10 is mounted on the second semiconductor chip 50 so that the bottom face 13 b of the frame 13 faces the first face 50 a of the second semiconductor chip 50, and the second electrode pads 52 are exposed. The first semiconductor chip 10 is positioned such that the array of the first electrode pads 18 and the array of the second electrode pads 52 are wire bonded to each other. In this embodiment, the first semiconductor chip 10 is mounted such that the array of the first electrode pads 18 and the array of the second electrode pads 52 are parallel to each other.

The first and second semiconductor chips 10 and 50, and the ceramic header 40 are electrically connected to each other by bonding wires 62. The bonding wires 62 are bonded according to an ordinary method using such metal thin wire as gold (Au).

The first electrode pads 18 and the first semiconductor chip connection pads 52 b are connected one-to-one via the first bonding wires 62 a.

The substrate connection pads 52 a and the third electrode pads 42 are connected one-to-one via the second bonding wires 62 b.

If this package format is used, the sealing can be done while allowing only the movable section to move. It is unnecessary to seal the entire MEMS chip and the bonding wires within a closed space. Thus, the semiconductor chip package can be slimmer and more compact.

The ceramic header 40 has extremely high rigidity so that the ceramic header can increase the resistance of the package against external force.

Now the operation of the semiconductor chip package will be briefly described with reference to FIG. 6A and FIG. 6B. It is assumed that the first semiconductor chip 10, which is an acceleration sensor chip, has detected acceleration. The signals related to the detected acceleration are sent from the first electrode pads 18 to the second semiconductor chip 50, which is a control chip, via the first bonding wires 62 a and the first semiconductor chip connection pads 52 b. The signals processed by the second semiconductor chip are supplied to the external device (not shown) via the substrate connection pads 52 a, second bonding wires 62 b, third electrode pads 42 and external terminals 44 of the ceramic header 40. The signals to be introduced to the first or second semiconductor chip are propagated through the reverse route.

The fabrication steps of the semiconductor chip package will be described with reference to FIG. 6A and FIG. 6B.

First, the first semiconductor chip, which is a MEMS chip having the above mentioned configuration, ceramic header 40 and second semiconductor chip are prepared.

In the chip mounting area of the ceramic header 40, that is the inner area 40 ab, the first and second semiconductor chips are mounted. In this embodiment, the first and second semiconductor chips 10 and 50 should be stacked. Therefore, these semiconductor chips may be formed as a stacked product in advance, and this stacked product may be mounted on the ceramic header 40.

It should be noted that the first and second semiconductor chips 10 and 50 may be mounted separately or next to each other in the inner area 40 a, without being stacked.

Finally, the first bonding wires 62 a for connecting the first electrode pads 18 of the first semiconductor chip 10 to the second electrode pads 52 of the second semiconductor chip 50 are formed according to an ordinary method using a known bonding device. Also, the second bonding wires 62 b for connecting the second electrode pads 52 of the second semiconductor chip 50 to the third electrode pads 42 of the ceramic header 40 are formed according to an ordinary method using a known bonding device. By these manufacturing steps, the semiconductor chip package 1 is fabricated.

If these steps are used, it is not necessary to seal the entire ceramic header 40. Thus, the semiconductor chip package 1 can be fabricated by simpler steps.

Third Embodiment

A semiconductor device according to the third embodiment of the present invention will be described with reference to FIG. 7A and FIG. 7B. The third embodiment relates to a packaged semiconductor device having a metal or resin substrate instead of the ceramic header of the second embodiment.

FIG. 7A depicts the composing elements of the semiconductor chip package of the third embodiment viewed from the top. FIG. 7B is a cross-section sectioned at the dashed line 7B-7B in FIG. 7A. In FIG. 7A, the second sealing section shown in FIG. 7B is omitted to clarify the internal configuration.

In the following description, the same or similar components in the semiconductor device 1 of the present embodiment as the semiconductor device of the second embodiment are not described in detail. The same or similar composing elements are denoted with the same reference numbers in FIGS. 6A, 6B, 7A and 7B.

The semiconductor chip package 1 includes the substrate 40. For the base material 40X which is the major composing element of the substrate 40, heat resistant polymer material, such as heat-resistant glass-base epoxy-resin and BT resin, are preferably used. The substrate 40 may be a metal substrate of which the base material is copper (Cu) or a copper alloy.

Specific composing elements of the substrate 40 shown in FIGS. 7A and 7B are the same as the ceramic header shown in FIGS. 6A and 6B, and are denoted with the same reference numbers, so that a detailed description thereof is omitted. In the third embodiment, a flat type substrate 40 is shown, but a sealing cap which has a container shape, having a concave section for receiving the chip, may be used, just like the ceramic header of the second embodiment.

The semiconductor device 1 has a first semiconductor chip 10, a second semiconductor chip 50 and a second sealing section 70 for sealing the first semiconductor chip 10, second semiconductor chip 50 and bonding wires 62. The bonding wires 62 connect the first electrode pads 18 of the first semiconductor chip 10, the second electrode pads 52 of the second semiconductor chip 50 and the third electrode pads 42 of the substrate 40. The second sealing section 70 can be formed by a known transfer mold method, using such sealing resin as epoxy mold resin and liquid sealing material.

If this configuration is used, a substrate which is less expensive than a costly ceramic header can be used. Therefore, a remarkable cost reduction is possible.

It should be noted that the second sealing section 70 may be applied to the semiconductor device of the second embodiment having the ceramic header 40 (FIGS. 6A and 6B). In other words, the first semiconductor chip 10, second semiconductor chip 50 and bonding wires 62, located in the concave section 49 a of the ceramic header 40 of the second embodiment, may be sealed by sealing resin if so desired.

Fourth Embodiment

A semiconductor device according to the fourth embodiment of the present invention will be described with reference to FIG. 8A and FIG. 8B. The fourth embodiment relates to a packaged semiconductor device having a lead frame instead of the ceramic header of the second embodiment or the substrate of the third embodiment.

FIG. 8A depicts the composing elements of the semiconductor chip package of the fourth embodiment viewed from the top. FIG. 8B depicts a cross-section sectioned at the dashed line 8B-8B in FIG. 8A. In FIG. 8A, the second sealing section 70 shown in FIG. 8B is omitted to clarify the internal configuration, and only the contour thereof is shown by the dotted line.

In the following description, the same or similar components of the semiconductor device 1 of the present embodiment as the semiconductor devices of the second and third embodiments are not described in detail. The same or similar composing elements are denoted with the same reference numbers in FIG. 6A to FIG. 8B.

The semiconductor chip package 1 includes the lead frame 90. The lead frame 90 may be a common lead frame made of such material as copper (Cu). The lead frame 90 has a chip mounting section 92 on which the first and second semiconductor chips are mounted and a plurality of leads 94 which are away from the chip mounting section 92.

The chip mounting section 92 is a square in this embodiment, which has a first face 92 a and a second face 92 b. The first face 92 a is in parallel to the second face 92 b. The chip mounting section 92 has a size which allows mounting the second semiconductor chip 50 on the first face 92 a.

Each of the leads 94 has a thin and elongated plate shape. Five leads 94, which are the same number as the substrate connection pads 52 a of the second semiconductor chip 50, are formed with equal spacing with each other. The five leads 94 are away from the one side of the square chip mounting section 92.

The first bonding wires 62 a connect the first electrode pads 18 of the first semiconductor chip 10 with the pads 52 b of the second semiconductor chip 50 by one-to-one relation. The second boding wires 62 b connect the leads 94 with the substrate connection pads 52 a by one-to-one relation. Thus, the number of the leads 94 is the same as that of the substrate connection pads 52 a.

The semiconductor device 1 has a second sealing section 70 for sealing a chip mounting section 92 of the lead frame 90, a part of the leads 94, the first semiconductor chip 10, the second semiconductor chip 50 and the bonding wires 62.

The second sealing section 70 can be formed by an ordinary method with a known semiconductor sealing device having a die, using such sealing resin as epoxy mold resin or liquid sealing material. Some parts of the leads 94 are exposed out of the second sealing section 70 as the exposed sections 94 a. These exposed sections 94 a function as external terminals.

The lead frame is normally a thin metal plate. Therefore, the semiconductor device can be slimmer.

The semiconductor device 1 of the present embodiment can be fabricated according to an ordinary method. Specifically, the first and second semiconductor chips 10 and 50 are mounted on the chip mounting section 92 of the lead frame 90. The first electrode pads 18 of the first semiconductor chip 10 and the second electrode pads 52 of the second semiconductor chip 50 are bonded by the first bonding wires 62 a. The second electrode pads 52 of the second semiconductor chip 50 and the leads 94 of the lead frame 90 are connected by the second bonding wires 62 b. By the sealing step using die, the second sealing section 70 is formed such that the section 94 a is exposed. The leads 94 positioned outside the chip mounting area 92 and the exposed section 94 a are cut from the lead frame main unit to separate the dies. By the above steps, the semiconductor device 1 having the above mentioned structure are obtained.

Modification to the Fourth Embodiment

Referring to FIG. 9A and FIG. 9B, a modification to the fourth embodiment will be described. In this modification, the second semiconductor chip is placed on the first semiconductor chip.

FIG. 9A shows a top view of the semiconductor chip package and FIG. 9B shows a cross-sectional view taken along the single-dot chain line 9B-9B in FIG. 9A. In FIG. 9A, only the contour of the second sealing section 70 is illustrated by the broken line for easier understanding of the structure of the semiconductor chip package.

In the following description, the same or similar components of the semiconductor device 1 of this modification as the fourth embodiment are not described in detail. The same or similar components are denoted with the same reference numerals and symbols in FIGS. 8A, 8B, 9A and 9B.

The semiconductor chip package 1 has a lead frame 90. The lead frame 90 has a chip mounting part 92 on which the first semiconductor chip 10 is placed, and leads 94 provided around the chip mounting part 92. The lead frame 90 is made from copper (Cu), for example. A known method is employed to create the lead frame 90.

The chip mounting part 92 has a first surface 92 a and a second surface 92 b. The second surface 92 b is generally in parallel to the first surface 92 a. The chip mounting part 92 has a rectangular shape. The first surface 92 a of the chip mounting part 92 has a size sufficient to support the first semiconductor chip 10 thereon. Each lead 94 has a shape of elongated thin plate.

The first semiconductor chip 10 is placed on the chip mounting part 92. The second semiconductor chip 50 is placed on the first semiconductor chip 10 such that the first electrode pads 18 of the first semiconductor chip 10 are exposed. The first semiconductor chip 10 has four sides. The first electrode pads 18 of the first semiconductor chip 10 are arranged along one of the four sides of the first semiconductor chip 10. The second semiconductor chip 50 does not lie over the first electrode pads 18 of the first semiconductor chip 10.

The location of the first semiconductor chip 10 on the chip mounting part 92 may be at the center of the chip mounting part 92 or may be shifted to one of the four sides of the chip mounting part 92. As seen in FIG. 9A, the size of the second semiconductor chip 50 is larger than the first semiconductor chip 10 when viewed from the top, so that the first semiconductor chip 10 is positioned close to one side of the chip mounting part 92.

The reason why the first semiconductor chip 10 is located in the above described position is because the overall mounting area of the first semiconductor chip 10, second semiconductor chip 50 and chip mounting part 92, when viewed from the top, can be minimum. If the overlapping area of the second semiconductor chip 50 and chip mounting part 92 is small, a large stress of an injected resin acts on the second surface 50 b of the second semiconductor chip 50 when the first and second semiconductor chips and the chip mounting part 92 are enclosed in a molding die and the resin is injected in the molding die. The large stress of the injected resin may separate the second semiconductor chip 50 from the first semiconductor chip 10. To avoid this, the second semiconductor chip 50 exists within a contour of the chip mounting part 92 when viewed from the top in the FIG. 9A modification.

Second electrode pads 52 are provided on the second semiconductor chip 50 along two sides of the second semiconductor chip 50. One of the two sides is the side close to the first electrode pads 18 (i.e., right side of the second semiconductor chip in FIG. 9A), and the other is the opposite side (i.e., left side). Each second electrode pad 52 includes two types of pads 52 a and 52 b. The pads 52 a are provided for connection to the substrate and the pads 52 b are provided for connection to the first semiconductor chip. The pads 52 a and 52 b are mixedly arranged along the right side of the second semiconductor chip 50. Only the pads 52 a are arranged along the left side of the second semiconductor chip 50.

The first bonding wires 62 a connect the first electrode pads 18 of the first semiconductor chip 10 with the pads 52 b of the second semiconductor chip 50 by one-to-one relation.

The second bonding wires 62 b connect the pads 52 a of the second semiconductor chip 50 with the leads 94 of the lead frame 90 by one-to-one relation.

The semiconductor device 1 includes a second sealing section 70 for sealing the chip mounting part 92 of the lead frame 90, part of the leads 94, the first semiconductor chip 10, the second semiconductor chip 50 and the bonding wires 62. The material and shape of the second sealing section 70 are the same as the fourth embodiment.

It should be noted that a coating 75 may be provided over the chip mounting part 92, the first semiconductor chip 10 and part of the first bonding wires 62 a, before the second sealing 70 is provided.

The coating 75 is made from a liquid resin of which elastic modulus is lower than the second sealing 70. The coating 75 is provided for protecting the first semiconductor chip 10 from external shocks. If the coating 75 is provided, the shock resistance of the semiconductor device 1 is enhanced.

The semiconductor device 1 can be fabricated by a known method, as described below.

The first semiconductor chip 10 is placed on the chip mounting part 92 of the lead frame 90, and the second semiconductor chip 50 is placed on the first semiconductor chip 10. The first electrode pads 18 of the first semiconductor chip 10 are connected to the second electrode pads 52 of the second semiconductor chip 50 by the first bonding wires 62 a. The second electrode pads of the second semiconductor chip 50 are connected to the leads 94 of the lead frame 90 by the second boding wires 62 b. The second sealing 70 is formed by a sealing process using a molding die, such that part of the leads 94 is exposed. Prior to the sealing process, the first semiconductor chip 10, chip mounting part 92 and part of the first bonding wires 62 a may be sealed by the coating 75. The coating 75 is formed by a dispenser, for example. Then, the exposed portions of the leads 94 are cut off from the lead frame to provide a complete semiconductor device 1.

Fifth Embodiment

Referring to FIG. 10A and FIG. 10B, a fifth embodiment of the present invention will be described. The semiconductor device of this embodiment does not have the thin plate member of the fourth embodiment and the second semiconductor chip is directly placed on the first sealing.

FIG. 10A is a plan view of the semiconductor chip package of the fifth embodiment. FIG. 10B is a cross-sectional view taken along the line 10B-10B in FIG. 10A. In FIG. 10A, only the contour of the second sealing 70 is depicted by the broken line for the sake of easy understanding of the structure of the semiconductor chip package.

In the following description, the same or similar components of the semiconductor device 1 of this embodiment as the fourth embodiment are not described in detail. The same or similar components are denoted with the same reference numerals and symbols in FIGS. 8A, 8B, 10A and 10B.

The semiconductor chip package 1 has a lead frame 90, a first semiconductor chip 10, a second semiconductor chip 50, first bonding wires 62 a, second bonding wires 62 b, and second sealing 70.

The lead frame 90 has a chip mounting part 92 on which the first semiconductor chip 10 is placed, and leads 94 provided around the chip mounting part 92. The lead frame 90 is made from copper (Cu), for example. A known method is employed to create the lead frame 90.

The first semiconductor chip 10 includes a movable structure 15, a frame 13 surrounding the movable structure 15, first sealing 20 and first electrode pads 18. The movable structure 15 has beams 14 a and a movable body 14 b. The frame 13 is continuous to the beams 14 a, and the beams 14 a are continuous to the movable body 14 b.

The beams 14 a have a reduced thickness, as compared with the frame 13 and movable body 14 b. Each beam 14 a has a narrow width. The beams 14 a connect the movable body 14 b to the frame 13. The beams 14 a are bendable. The movable body 14 b is received in the inner space of the frame 13. The movable body 14 b is spaced from the frame 13.

The first sealing 20 has a closed shape and is provided on the frame 13 to surround the movable body and the beams. The first sealing 20 is made from a known liquid resin or a known bonding sheet material. The bonding sheet material is adhesive.

The first electrode pads 18 are placed on the frame 13 outside the first sealing 20. As shown in FIG. 10A, the frame 13 has four sides, and the first electrode pads 18 are arranged along one of the four sides of the frame 13.

The first semiconductor chip 10 is located on a chip mounting part 92 of the lead frame 90. The second semiconductor chip 50 is located on the first semiconductor chip 10. As shown in FIG. 10A, the positional relationship between the first semiconductor chip 10 and the chip mounting part 92, and the positional relationship between the second semiconductor chip 50 and the first semiconductor chip 10 are the same as those depicted in FIG. 9A.

The first semiconductor chip 10 has four sides, and the first electrode pads 18 of the first semiconductor chip 10 are arranged along one of the four sides of the first semiconductor chip 10. This configuration is the same as FIG. 9A.

The second semiconductor chip 50 has four sides. The second electrode pads 52 of the second semiconductor chip 50 are provided along one side (right side), which is close to the first electrode pads 18, and along the opposite side (left side). The second electrode pads 52 includes the first pads 52 a to be connected to the substrate, and the second pads 52 b to be connected to the first semiconductor chip. The pads 52 a and 52 b are arranged in the same manner as FIG. 9A.

The first bonding wires 62 a connect the first electrode pads 18 of the first semiconductor chip 10 with the pads 52 a of the second semiconductor chip 50 by one-to-one relation. The second bonding wires 62 b connect the pads 52 b of the second semiconductor chip 50 with the leads 94 of the lead frame 90 by one-to-one relation.

The second sealing section 70 seals the chip mounting part 92 of the lead frame 90, part of the leads 94, the first semiconductor chip 10, the second semiconductor chip 50 and the bonding wires 62. The material and shape of the second sealing section 70 are the same as the fourth embodiment. Like the configuration shown in FIG. 9A, a coating 75 may be provided over the chip mounting part 92, the first semiconductor chip 10 and part of the first bonding wires 62 a, before the second sealing 70 is provided.

The semiconductor device 1 of the fifth embodiment does not have the thin plate member, but is still able to seal the first and second semiconductor chips, without adversely affecting the movements of the movable structure 15 of the first semiconductor chip 10. Therefore, the fifth embodiment can achieve not only the same advantages as the fourth embodiment (or its modification), but also reduction of the thickness of the semiconductor device.

The semiconductor device 1 of this embodiment can be fabricated by a known method. Specifically, the semiconductor device 1 can be made by the same method as that used in the “Modification to the Fourth Embodiment.”

The first semiconductor chip 10 of the fifth embodiment can be fabricated by the method described in the first embodiment. It should be noted, however, that the step of providing the thin plate member 30 is unnecessary. The semiconductor devices are diced on the basis of the chip formation areas.

Because the thin plate member 30 is not provided, the dicing refuse may adhere onto the movable structure 15 when the dicing process is carried out. However, the fifth embodiment can reduce the manufacturing cost because the thin plate member 30 is unnecessary. Also, the manufacturing time can be reduced because the step of providing the thin plate member is omitted. This improves the manufacturing efficiency.

This application is based on Japanese Patent Application No. 2005-195833 filed on Jul. 5, 2005 and Japanese Patent Application No. 2006-185698 filed on Jul. 5, 2006, and the entire disclosures of these two applications are incorporated herein by reference. 

1. A semiconductor chip package comprising: a first semiconductor chip including: a frame section having a top face and a bottom face, a movable structure having a movable section formed in said frame section, a plurality of first electrode pads arranged on said top face of said frame section, a first sealing section formed on the top face of said frame section and having a closed loop shape surrounding said movable structure, and a thin plate member provided on said first sealing section for sealing said movable structure; a second semiconductor chip having a first surface, a second surface, and a plurality of second electrode pads arranged on said first surface, the first surface being in parallel to the second surface; a substrate including a first main surface having a semiconductor mounting area, a second main surface, and a plurality of third electrode pads formed along one edge of said first main surface outside said semiconductor chip mounting area, said first and second semiconductor chips being mounted on said semiconductor chip mounting area, and said first main surface being in parallel to the second main surface; first bonding wires for connecting said plurality of first electrode pads to said plurality of second electrode pads respectively; and second bonding wires for connecting said plurality of second electrode pads to said plurality of third electrode pads respectively.
 2. The semiconductor chip package according to claim 1, wherein said second semiconductor chip is mounted on said chip mounting area such that the second surface of said second semiconductor chip is in contact with said chip mounting area, and said first semiconductor chip is mounted on said first surface of said second semiconductor chip such that said bottom face of said first semiconductor chip is in contact with said second semiconductor chip, with said second electrode pads of said second semiconductor chip exposed.
 3. The semiconductor chip package according to claim 1, wherein said substrate is a container type ceramic header having a concave section, and said semiconductor chip mounting area is formed in said concave section.
 4. The semiconductor chip package according to claim 1, wherein said substrate is a metal substrate or a resin substrate.
 5. The semiconductor chip package according to claim 1 further comprising a second sealing section for covering and sealing said first semiconductor chip, said second semiconductor chip, said first sealing section, said first bonding wires and said second bonding wires.
 6. The semiconductor chip package according to claim 1, wherein said first sealing section is formed of resin.
 7. The semiconductor chip package according to claim 1, wherein said first sealing section is formed of a sheet member.
 8. The semiconductor chip package according to claim 1, wherein said first semiconductor chip is an MEMS chip.
 9. A semiconductor chip package comprising: a first semiconductor chip including: a frame section having a top face and a bottom face, a movable structure having a movable section formed in said frame section, a plurality of first electrode pads arranged on said top face side of said frame section, a first sealing section formed on the top face of said frame section and having a closed loop shape surrounding said movable structure, and a thin plate member provided on said first sealing section for sealing said movable structure; a second semiconductor chip having a first surface, a second surface, and a plurality of second electrode pads arranged on said first surface, the first surface being in parallel to the second surface; a lead frame including a chip mount section that has a front face and a back face, and a plurality of leads provided away from an edge of said chip mounting section, said first and second semiconductor chips being mounted on said front face of said chip mounting section; first bonding wires for connecting said plurality of first electrode pads to said plurality of second electrode pads respectively; second bonding wires for connecting said plurality of second electrode pads to said plurality of leads respectively; and a second sealing section for covering and sealing said first semiconductor chip, said second semiconductor chip, said first sealing section, said chip mounting section, said first bonding wires and said second bonding wires, with a part of said plurality of leads being exposed.
 10. The semiconductor chip package according to claim 9, wherein said first sealing section is formed of resin.
 11. The semiconductor chip package according to claim 9, wherein said first sealing section is formed of a sheet member.
 12. A semiconductor chip package comprising: a first MEMS semiconductor chip including: a frame section having a top face and a bottom face, a movable structure having a movable section formed in said frame section, a plurality of first electrode pads arranged on said top face of said frame section, a first sealing section formed on the top face of said frame section and having a closed loop shape surrounding said movable structure, and a thin plate member provided on said first sealing section for sealing said movable structure; a second semiconductor chip having a first surface, a second surface, and a plurality of second electrode pads arranged on said first surface, the first surface being in parallel to the second surface, said second semiconductor chip being located on the first semiconductor chip such that the plurality of first electrode pads are exposed; a lead frame including a chip mount section that has a front face and a back face, and a plurality of leads provided away from an edge of said chip mounting section, said first and second semiconductor chips being mounted on said front face of said chip mounting section; first bonding wires for connecting said plurality of first electrode pads to said plurality of second electrode pads respectively; second bonding wires for connecting said plurality of second electrode pads to said plurality of leads respectively; and a second sealing section for covering and sealing said first semiconductor chip, said second semiconductor chip, said first sealing section, said chip mounting section, said first bonding wires and said second bonding wires, with a part of said plurality of leads being exposed.
 13. A semiconductor chip package comprising: a first semiconductor chip including: a frame section having a top face and a bottom face, a movable structure having a movable section formed in said frame section, a plurality of first electrode pads arranged on said top face of said frame section, and a first sealing section formed on the top face of said frame section and having a closed loop shape surrounding said movable structure; a second semiconductor chip having a first surface, a second surface, and a plurality of second electrode pads arranged on said first surface, the first surface being in parallel to the second surface, said second semiconductor chip extending over the first sealing section such that the plurality of first electrode pads are exposed; a lead frame including a chip mount section that has a front face and a back face, and a plurality of leads provided away from an edge of said chip mounting section, said first and second semiconductor chips being mounted on said front face of said chip mounting section; first bonding wires for connecting said plurality of first electrode pads to said plurality of second electrode pads respectively; second bonding wires for connecting said plurality of second electrode pads to said plurality of leads respectively; and a second sealing section for covering and sealing said first semiconductor chip, said second semiconductor chip, said first sealing section, said chip mounting section, said first bonding wires and said second bonding wires, with a part of said plurality of leads being exposed. 